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Journal Articles

Preparation of TiO$$_{2}$$-anatase film on Si(001) substrate with TiN and SrTiO$$_{3}$$ as buffer layers

Sugiharuto; Yamamoto, Shunya; Sumita, Taishi; Miyashita, Atsumi

Journal of Physics; Condensed Matter, 13(13), p.2875 - 2881, 2001/04

https://doi.org/10.1088/0953-8984/13/13/302
 Times Cited Count：15 Percentile：61.85(Physics, Condensed Matter)

An epitaxial TiO$$_{2}$$-anatase thin film was grown on the Si(001) substrate with SrTiO$$_{3}$$/TiN as the buffer layers by pulsed laser deposition technique under an oxygen gas supply. The characterization of the epitaxial TiO$$_{2}$$-anatase film was performed using the X-ray diffraction method. The crystallographic relationships between the TiO$$_{2}$$-anatase film and SrTiO$$_{3}$$/TiN buffer layers were analyzed by the $$theta$$-2$$theta$$ scan and pole figure measurement. The growth direction of the films was determined as $$rm TiO_{2}langle 001rangle$$ / $$rm SrTiO_{3}langle 001rangle$$ / $$rm TiNlangle 001rangle$$ / $$rm Silangle 001rangle$$ and their in-plane relationship $$rm TiO_{2}{110}$$ // $$rm SrTiO_{3}{100}$$ // $$rm TiN{100}$$ // $$rm Si{100}$$. The crystalline quality of TiO$$_{2}$$-anatase was examined by the rocking curve analysis. The composition of the thin film packaging was characterized by Rutherford backscattering spectrometry (RBS) using 2.0 MeV $$^{4}$$He beam.

JAEA Reports

None

*; *; ; Takeda, Seiichiro

PNC TN8410 97-433, 49 Pages, 1997/12

PNC-TN8410-97-433.pdf:1.44MB

None

Oral presentation

Soft X-ray photoemission spectroscopy of water-adsorbed titanium dioxide surfaces

Katsube, Daiki*; Ono, Shinya*; Takayanagi, Shuhei*; Ojima, Shoki*; Maeda, Motoyasu*; Yoshida, Hikaru*; Nishi, Shizuka*; Yoshigoe, Akitaka; Abe, Masayuki*

no journal, , 

TiO$$_{2}$$ has been extensively studied because of high photocatalytic activity. However, the basic reaction process of photocatalysis has not been understood yet. In this study, the difference in water adsorption reaction between rutile and anatase was clarified using synchrotron radiation soft X-ray photoelectron spectroscopy (XPS). The OH component observed at the higher binding energy side was clearly confirmed in the rutile type TiOTiO$$_{2}$$, suggesting that the rutile type is more reactive to water adsorption.

Patent

窒素元素ドープ酸化チタンの製造方法

吉越 章隆

阿部 真之*; 勝部 大樹*; 大野 真也*

JP, 2019-153049  Patent licensing information  Patent publication (In Japanese)

【課題】 効率的なN元素ドープTIO2の製造方法を提供する。 【解決手段】本発明に係るN元素ドープTIO2の製造方法は、ターゲットとなるTIO2を真空チャンバ内の所定位置に配置するステップと、真空チャンバを真空引きするステップと、ノズルを所定温度に加熱するステップと、ノズルを所定温度に維持しつつ、ノズルからNO分子の超音速分子線をターゲットに照射するステップとを備える。

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